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العنوان
MEMS Based Scanning Fabry Perot Spectrometer \
المؤلف
Elzeiny, Walid Elsayed Mohamed Mohamed.
هيئة الاعداد
باحث / وليد السيد محمد محمد الزيني
مشرف / ضياء عبد المجيد خليل
مشرف / ياسر محمد صبرى جاد أبوالمجد
مناقش / ضياء عبد المجيد خليل
تاريخ النشر
2022.
عدد الصفحات
162 P. :
اللغة
الإنجليزية
الدرجة
ماجستير
التخصص
الهندسة المدنية والإنشائية
تاريخ الإجازة
1/1/2022
مكان الإجازة
جامعة عين شمس - كلية الهندسة - هندسة الالكترونيات و الاتصالات الكهربية
الفهرس
Only 14 pages are availabe for public view

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Abstract

This thesis aims to study and investigate architectures of optical spectrometer designed by combining more than one Fabry-Perot interferometer (FPI). A novel architecture of Coupled Cavity Interferometers based on FPIs is studied, analyzed and designed to work as a Fourier Transform Infrared (FTIR) Spectrometer. This interferometer obtains a three times enhancement in resolution compared to the more common Michelson in-terferometer. Furthermore, an algorithm for fixing issues in the output spectrum of cas-caded static and scanning FPIs, which occur especially in miniaturized cases, is studied and simulated. The algorithm works by modifying the integral equation that is used to find the spectrum of the interferometer, to use complex instead of real integrals, show-ing improvements relative to a reference algorithm, and giving opportunity for further miniaturization of the FPIs. Optical Modelling and experimental characterization of the designs of interest, after fabrication on Micro Electro-Mechanical Systems (MEMS) chips, are presented to validate the introduced concepts.