الفهرس 
MEMS Inertial Sensors and Systems OverviewOnly 14 pages are availabe for public view
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Abstract
This thesis is divided into seven chapters as follow:
Chapter 1 is an introduction including the motivation for this work, followed by the thesis outline.
Chapter 2 includes a background overview of MEMS inertial sensors and their characteristics and different techniques for interfacing with capacitive inertial sen-sors.
Chapter 3 explains the Mechanical Quadrature error in MEMS vibratory gyro-scopes and the different proposed techniques to eliminate it, highlighting their ad-vantages and drawbacks.
Chapter 4 focuses on quadrature cancellation based on Open loop Signal Injection technique and system design of the quadrature loop to be implemented.
Chapter 5 illustrates the circuit implementation of different blocks of the Open loop quadrature cancellation system and the behavioral model for the loop.
Chapter 6 presents the simulation results of individual blocks and the top level as well, including MATLAB simulations and circuit simulations.
Chapter 7 is the conclusion for this work and the suggested future work on this system either an optimization or extra features to be implemented.