الفهرس 
Chapter 1: IntroductionOnly 14 pages are availabe for public view
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Abstract
Micro-Electro Mechanical Systems (MEMS) encompass the processbased
technologies used to fabricate tiny integrated devices and/or
systems that integrate functionalities from different physical domains into
one device. Such devices are fabricated using a wide range of
technologies, having in common the ability to create structures with
micro- and even nanometer accuracies. The products range in size from a
few micrometers to millimeters. These devices (or systems) have the
ability to sense, control and actuate.
The purpose of this thesis is to present the analysis and design of both
pressure and microphone sensors. Pressure and microphone sensors
represent the greatest successes of the micromachining technology.
Pressure sensors are used in automobiles, robotics, space, process
industries, cooling applications for VLSI applications and also for
biomedical applications. Also, Microphone optimization for
photoacoustic signal detection has become an attractive and realistic goal
with MEMS based devices. The Polysilicon material is used for MEMS
pressure and microphone sensors because of its highest sensitivity to
strain changes. Analytical formulation is conducted and the results are
compared with the published experimental work and good agreement is
obtained.
In this thesis, the analysis of MEMS based pressure and microphone
sensors are carried out using MATLAB software. MATLAB environment
is employed to model CNT MEMS sensors and accurate models are
devised to study their performance.
The proposed models allow handling different parameters affecting the
performance of these sensors. Also, the Finite Element Analysis
methodology is conducted and comparative analysis of the two different
shaped diaphragms (circular and square) piezoresistive pressure sensors is
presented.