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Abstract
1\ particle - In - Cell with Monte Carlo collision ( PlC .. MCC) simulated is used to model the plasma generated
in a parallel plate radio - frequency ( RP ) capacitively
discharge in Argon and hydrogen at low pressure . The
boundary condition include the si rfacc charcc on the
mo ’on obt in by finite iffercncc methods leading to
the self- consistent creation of sheaths on the boundaries.
The collision between charged particles and neutral
background gas atoms is included in the simulation,
other interactions are neglected at low pressure .
Numerical model , for plasma simulation is presented.
The plasma distributions of Electric’ field and Electric
potential profiles with the axial distance for both
electrons and ions obtained from this simulation were in
good agreement with those obtained by other simulations
using continuum models. The mathematical model j s
l s d for s ving th magnetohydyru 111ic and plasma
k
it .ric ·~qL ,) 1’01 S with Ol11e 11\/1)··